AWM40000 系列气体质量流量传感器，   放大， 流量/压力范围：+ 1000 SCCM; 接口类型：岐管。

The AWM40000 Series Airflow Sensors are based on proven microbridge technology and include both unamplified sensor-only devices and amplified signal conditioned devices.

 

微桥气体质量流量传感器的工作原理是热传递。气体质量流量经引导流过传感元件的表面。输出电压与流过封装进出口的空气或其他气体质量成正比。

 

This sensor has a unique silicon chip based on advanced microstructure technology. It consists of a thin film, thermally-isolated bridge structure containing heater, and temperature sensing elements. 桥结构能够快速灵敏地响应流过芯片的空气或其他气体气流。中心加热元件两侧的双传感元件还能指示气流流过的方向和速率。

 

The specially-designed housing precisely directs and controls the airflow across the microstructure sensing element. 封装的机械设计能够轻松将其安装在印刷电路板上。

 

Laser-trimmed, thick film and thin film resistors provide consistent interchangeability from one device to the next. 微桥气体质量流量传感器利用包裹在氮化硅薄膜中的热电阻。这些电阻呈悬浮状态，在硅片的刻蚀腔上方形成两座桥。

 

芯片置于精确规格的气流通道，提供可重复的流量响应。Highly effective, thermal isolation for the heater and sensing resistors is attained by etching the cavity space beneath the flow sensor bridges.

 

微桥式气体质量流量传感器的小尺寸和热隔离功能实现对气流的极速响应及高灵敏度。Dual Wheatstone bridges control airflow measurement–one provides closed loop heater control, the other contains the dual sensing elements.

 

加热器电路通过提供与质量流量成正比的输出，最大程度地降低环境温度变化导致的输出变化。The circuit keeps the heater temperature at a constant differential (160°C) above ambient air temperature which is sensed by a heat-sunk resistor on the chip. 装置的输出与电源电压成比例，也与惠斯通电桥电路的差分电压相对应。

 

The unamplified versions require both a heater control circuit and a sensing bridge supply circuit for operation per specification. 这两种电路不在传感器电路板上，因此必须在应用中提供。Differential amplifier circuitry may be useful in providing output gain and/or introducing voltage offsets to the sensor output. The amplified versions' onboard circuits may be used to increase output gain and introduce voltage offsets. (See product datasheet and installation instructions for further circuit information.)

 

精密硅微机械加工

对 0.1 SCCM 至 6 SLPM 的低流量敏感

适用于较高流量

Low power consumption allows for use in portable devices and battery-powered applications

模拟输出

Standard 2,54 mm [0.10 in] mounting centers

激光修正达到可互换性

Accurate sensing of low pressure

 

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